Friction Coefficient

Remote nitrogen microwave plasma chemical vapor deposition from a tetramethyldisilazane precursor. 2. Properties of deposited silicon carbonitride films

Engineering / Technology / Physical sciences / Nitrogen / Refractive Index / Physical Optics / Structural Properties / Thin Solid Films / Elastic Modulus / Chemical Composition / Friction Coefficient / Physical Optics / Structural Properties / Thin Solid Films / Elastic Modulus / Chemical Composition / Friction Coefficient